Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    A surface micromachining process for suspended RF-MEMS applications using porous silicon


    Contributors:
    Ding, Y. (author) / Liu, Z. (author) / Liu, L. (author) / Li, Z. (author)

    Published in:

    Publication date :

    2003-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Micromachining techniques for silicon carbide MEMS

    Zorman, Christian / Rajan, Narayanan / Mehregany, Mehran | AIAA | 1999


    Fibre-optical MEMS switches based on bulk silicon micromachining

    Hoffmann, M. / Kopka, P. / Nusse, D. et al. | British Library Online Contents | 2003


    Silicon Micromachining Technology for Automotive Applications

    Walker, B. E. / Lee, K. W. | SAE Technical Papers | 1986


    Silicon Micromachining Technology for Automotive Applications

    Lee,K.W. / Walker,B.E. / Allied Automotive,US et al. | Automotive engineering | 1986


    Design of a RF-MEMS BAW filter using surface micromachining [4414-100]

    Cong, P. / Liu, Y. / Ren, T. et al. | British Library Conference Proceedings | 2001