Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Recent developments in dimensional metrology for microsystem components


    Contributors:
    Cao, S. (author) / Brand, U. (author) / Kleine-Besten, T. (author) / Hoffmann, W. (author) / Schwenke, H. (author) / Butefisch, S. (author) / Buttgenbach, S. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Mechanical properties of microsystem components (Invited Paper) [3479-17]

    Michel, B. / Vogel, D. / Grosser, V. et al. | British Library Conference Proceedings | 1998




    Transducer and protective PVD-films for applications in microsystem components

    Quandt, E. / Holleck, H. | British Library Online Contents | 1998


    Spacecraft Microaccelerometer Microsystem

    Fox, James / Mason, Andrew / Yazdi, Navid | AIAA | 1999