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    Title :

    Mechanical properties of microsystem components (Invited Paper) [3479-17]



    Conference:

    Conference; 9th, Laser interferometry: applications ; 1998 ; San Diego; CA



    Publication date :

    1998-01-01


    Size :

    12 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





    Nr. 3479

    DataCite | 1912


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    Frequency-shifting shadow moire technique [3479-16]

    Wang, Z. / Tan, Y. / Zhao, H. et al. | British Library Conference Proceedings | 1998


    Subnanometer laser metrology for spacecraft interferometry [3479-08]

    Leitch, J. W. / Kopp, G. A. / Noecker, C. et al. | British Library Conference Proceedings | 1998