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    Title :

    Stitching-Error Reduction in Gratings by Shot-Shifted Electron-Beam Lithography


    Contributors:

    Published in:

    Publication date :

    2001-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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