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    Title :

    A golden-template self-generating method for patterned wafer inspection


    Contributors:
    Xie, P. (author) / Guan, S.-U. (author)

    Published in:

    Publication date :

    2000-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    006.42



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    Patterned wafer inspection by high resolution spectral estimation techniques

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    Practical Golden Template Comparison

    Silver, W. / Robotic Industries Association / Automated Imaging Association et al. | British Library Conference Proceedings | 1990