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    Title :

    Micro-Opto-Mechanical Vibration Sensor Integrated on Silicon


    Contributors:
    Ollier, E. (author) / Philippe, P. (author) / Chabrol, C. (author) / Mottier, P. (author)

    Published in:

    Publication date :

    1999-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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