The compatibility of porous silicon, (PSi) and anodic bonding (AB) technologies for the realization of sensing microcomponents in lab-on-chip applications is demonstrated. Sensor for chemical and biological species have been fabricated promising further integration with optical and micromechanical devices.


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    Title :

    Integrated silicon-glass opto-chemical sensor for lab-on-chip applications


    Contributors:
    De Stefano, L. (author) / Malecki, K. (author) / Moretti, L. (author) / Della Corte, F. (author) / Rendina, I. (author)


    Publication date :

    2004-01-01


    Size :

    133417 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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