Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Microstructure Evolution of Atomic Layer Deposited Zinc-Oxide Films


    Contributors:
    Kotha, R. (author) / Elam, D. (author) / Hoy, J. (author) / Collins, G. (author) / Hackworth, R. (author) / Chen, C. (author) / Chabanov, A. (author) / Ayon, A. (author) / Song, G. / Malla, R.B.

    Conference:

    12th, International Conference on Engineering, Science, Construction, & Operations in Challenging Environments ; 2010 ; Honolulu, HI; 2010



    Publication date :

    2010-01-01


    Size :

    9 pages


    Remarks:

    Includes bibliographical references



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English