Microstructure Evolution of Atomic Layer Deposited Zinc-Oxide Films
12th, International Conference on Engineering, Science, Construction, & Operations in Challenging Environments ; 2010 ; Honolulu, HI; 2010
International Conference on Engineering, Science, Construction, & Operations in Challenging Environments ; 3452-3460
2010-01-01
9 pages
Includes bibliographical references
Aufsatz (Konferenz)
Englisch
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