Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Piezoresistive and piezoelectric MEMS strain sensors for vibration detection [6529-94]



    Conference:

    Sensors and smart structures technologies for civil, mechanical, and aerospace systems ; 2007 ; San Diego, Calif.



    Publication date :

    2007-01-01


    Size :

    65292V


    Remarks:

    Includes bibliographical references and author index.




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Piezoresistive in-line integrated force sensors for on-chip measurement and control [6529-78]

    Teichert, K. / Waterfall, T. / Jensen, B. et al. | British Library Conference Proceedings | 2007


    A MEMS vibration sensor based on Mach Zehnder interferometers [6529-76]

    Ma, T. / Zhao, W. / Liu, J. et al. | British Library Conference Proceedings | 2007


    Multiple damage detection techniques by dynamic strain measurements using FBG sensors [6529-118]

    Park, H.-J. / Koo, K.-Y. / Yun, C.-B. et al. | British Library Conference Proceedings | 2007


    Wireless piezoelectric acoustic-electric power feedthru [6529-134]

    Bao, X. / Doty, B. J. / Sherrit, S. et al. | British Library Conference Proceedings | 2007


    Microfabrication of a wall shear stress sensor using side-implanted piezoresistive tethers [6529-13]

    Li, Y. / Nishida, T. / Arnold, D. P. et al. | British Library Conference Proceedings | 2007