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    Title :

    A MEMS vibration sensor based on Mach Zehnder interferometers [6529-76]



    Conference:

    Sensors and smart structures technologies for civil, mechanical, and aerospace systems ; 2007 ; San Diego, Calif.



    Publication date :

    2007-01-01


    Size :

    65292C


    Remarks:

    Includes bibliographical references and author index.




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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