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    Titel :

    Piezoresistive and piezoelectric MEMS strain sensors for vibration detection [6529-94]



    Kongress:

    Sensors and smart structures technologies for civil, mechanical, and aerospace systems ; 2007 ; San Diego, Calif.



    Erscheinungsdatum :

    01.01.2007


    Format / Umfang :

    65292V


    Anmerkungen:

    Includes bibliographical references and author index.




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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