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    Title :

    CANEUS2006-11039 Hermeticity Assessment of MEMS Micro Packages: Leak Rate Measurements Based on Infrared Spectroscopy



    Conference:

    CONFERENCE, CANEUS 2006 MNT for aerospace applications ; 2006 ; Toulouse, France



    Publication date :

    2006-01-01


    Size :

    6 pages


    Remarks:

    Includes bibliographical references and author index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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