Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    CANEUS2006-11039 Hermeticity Assessment of MEMS Micro Packages: Leak Rate Measurements Based on Infrared Spectroscopy



    Kongress:

    CONFERENCE, CANEUS 2006 MNT for aerospace applications ; 2006 ; Toulouse, France



    Erscheinungsdatum :

    2006-01-01


    Format / Umfang :

    6 pages


    Anmerkungen:

    Includes bibliographical references and author index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    CANEUS2006-11088 MEMS Reliability Assessment Methodology for Aerospace Applications

    Chauveau, P. / Blondy, P. / Pothier, A. et al. | British Library Conference Proceedings | 2006


    CANEUS2006-11083 MEMS Inertial Technology for Aerospace Applications

    Lautenschlager, E. J. / American Society of Mechanical Engineers | British Library Conference Proceedings | 2006


    CANEUS2006-11018 MEMS Based One Shot Electro-Thermal Micro-Switches for System Reconfiguration

    Pennarun, P. / Rossi, C. / Esteve, D. et al. | British Library Conference Proceedings | 2006


    CANEUS2006-11057 MEMS Reliability: Accurate Measurements of Beam Stiffness Using Nanoindentation Techniques

    Seguineau, C. / Desmarres, J.-M. / Dhennin, J. et al. | British Library Conference Proceedings | 2006


    CANEUS2006-11044 Silicon MEMS Pressure Sensors for Aerospace Applications

    Nese, M. / Seeberg, B. E. / American Society of Mechanical Engineers | British Library Conference Proceedings | 2006