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    Title :

    CANEUS2006-11057 MEMS Reliability: Accurate Measurements of Beam Stiffness Using Nanoindentation Techniques



    Conference:

    CONFERENCE, CANEUS 2006 MNT for aerospace applications ; 2006 ; Toulouse, France



    Publication date :

    2006-01-01


    Size :

    8 pages


    Remarks:

    Includes bibliographical references and author index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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