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    Title :

    AIAA-2004-6741 Mechanical Reliability Evaluation and its Standardization of Thin Films Used in MEMS


    Contributors:

    Conference:

    Conference, Micro-nano-technologies for aerospace applications; A collection of the CANEUS 2004 ; 2004 ; Monterey, Calif



    Publication date :

    2004-01-01


    Size :

    8 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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