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    Title :

    At-wavelength metrology on Sc-based multilayers for the UV and water window [5188-17]



    Conference:

    Annual conference, Advanced characterization techniques for optics, semiconductors, and nanotechnologies



    Publication date :

    2003-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Reliable determination of wavelength dependence of thin film refractive index [5188-25]

    Tikhonravov, A. V. / Trubetskov, M. K. / Amotchkina, T. V. et al. | British Library Conference Proceedings | 2003


    Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform [5188-41]

    Yu, Y. / Zhang, B. / Jiao, Y. et al. | British Library Conference Proceedings | 2003


    Advanced industrial fluorescence metrology used for qualification of high-quality optical materials [5188-23]

    Engel, A. / Becker, H.-J. / Sohr, O. et al. | British Library Conference Proceedings | 2003


    New magnetic semiconductor sulfospinels with cobalt [5188-47]

    Saifullaeva, D. A. / Solieva, S. F. / International Society for Optical Engineering | British Library Conference Proceedings | 2003


    Mueller matrix polarimeter in 157 nm [5188-18]

    Jin, L. / Kowa, H. / Otani, Y. et al. | British Library Conference Proceedings | 2003