AIAA-2002-5750 Concept of Ultra-Vacuum No-Lithography MBE Technologies for 3D Nanoelectronic CBFE ULSI/WSI on Spacefabs
Conference, NanoTech ; 2002 ; Houston, TX
NanoTech ; 5700/5766 ; 236-246
PAPERS- AMERICAN INSTITUTE OF AERONAUTICS AND ASTRONAUTICS ; 9 , 5700/5766
2002-01-01
11 pages
Conference paper
English
NanoTech , revolution , AIAA
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