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    Title :

    Present status of the ASET at-wavelength phase-shifting point diffraction interferometer [4146-05]


    Contributors:

    Conference:

    Conference, Soft x-ray and EUV imaging systems ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4146

    DataCite | 1925



    High-resolution soft x-ray microscopy [4146-24]

    Chao, W. / Anderson, E. H. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000


    Portable diagnostics for EUV light sources [4146-13]

    Stuik, R. / Constantinescu, R. C. / Hegeman, P. et al. | British Library Conference Proceedings | 2000


    High-precision measurements of the groove density of diffraction gratings [4146-16]

    Cocco, D. / Sergo, R. / Sostero, G. et al. | British Library Conference Proceedings | 2000