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    Title :

    High-resolution soft x-ray microscopy [4146-24]



    Conference:

    Conference, Soft x-ray and EUV imaging systems ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    5 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4146

    DataCite | 1925


    XM-1: the high-resolution soft x-ray microscope at the Advanced Light Source [4146-25]

    Pearson, A. L. / Chao, W. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000


    Si-based multilayers with high thermal stability [4146-23]

    Kaiser, N. / Yulin, S. / Feigl, T. et al. | British Library Conference Proceedings | 2000


    Portable diagnostics for EUV light sources [4146-13]

    Stuik, R. / Constantinescu, R. C. / Hegeman, P. et al. | British Library Conference Proceedings | 2000


    DUV or EUV: that is the question [4146-01]

    Williamson, D. M. / SPIE | British Library Conference Proceedings | 2000