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    Title :

    XM-1: the high-resolution soft x-ray microscope at the Advanced Light Source [4146-25]


    Contributors:
    Pearson, A. L. (author) / Chao, W. (author) / Denbeaux, G. (author) / Eimueller, T. (author) / Fischer, P. (author) / Johnson, L. E. (author) / Koehler, M. (author) / Larabell, C. (author) / Le Gros, M. A. (author) / Yager, D. (author)

    Conference:

    Conference, Soft x-ray and EUV imaging systems ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    6 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    High-resolution soft x-ray microscopy [4146-24]

    Chao, W. / Anderson, E. H. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000


    Nr. 4146

    DataCite | 1925


    Portable diagnostics for EUV light sources [4146-13]

    Stuik, R. / Constantinescu, R. C. / Hegeman, P. et al. | British Library Conference Proceedings | 2000


    Si-based multilayers with high thermal stability [4146-23]

    Kaiser, N. / Yulin, S. / Feigl, T. et al. | British Library Conference Proceedings | 2000


    DUV or EUV: that is the question [4146-01]

    Williamson, D. M. / SPIE | British Library Conference Proceedings | 2000