Silicon Oxynitride in Integrated Optics
Annual meeting; 11th, IEEE: Lasers and Electro-Optics Society; LEOS '98 ; 1998 ; Orlando; FL
1998-01-01
2 pages
IEEE cat no: 98CH36243
Conference paper
English
LEOS , lasers , IEEE , electro-optics
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
An IR spectroscopic study of silicon oxynitride films
IEEE | 2004
|Low-Hydrogen Silicon Oxynitride Optical Fibers Prepared by SPCVD
British Library Online Contents | 1995
|Silicon oxynitride waveguides developed for optomechanical sensing functions [4944-25]
British Library Conference Proceedings | 2003
|Passive alignment technique for all-silicon integrated optics
British Library Conference Proceedings | 1996
|Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers
Online Contents | 2012
|