Light-scattering method for structural perfection testing of both silicon surface and near-surface layers (Invited Paper) [2113-32]
International workshop, Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 1993 ; Kiev
Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 2113 ; 205-213
1994-01-01
9 pages
Conference paper
English
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