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    Titel :

    Light-scattering method for structural perfection testing of both silicon surface and near-surface layers (Invited Paper) [2113-32]



    Kongress:

    International workshop, Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 1993 ; Kiev



    Erscheinungsdatum :

    01.01.1994


    Format / Umfang :

    9 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Some aspects of thin-film ellipsometry (Invited Paper) [2113-02]

    Bortchagovsky, E. G. / SPIE | British Library Conference Proceedings | 1994


    Photoluminescence characterization of silicon subjected to various industrial treatments (Invited Paper) [2113-14]

    Valakh, M. Y. / Rudko, G. Y. / Shakhraychuk, N. I. et al. | British Library Conference Proceedings | 1994


    Nr. 2113

    DataCite | 1886


    Laser-thermal diagnostics of multilayer opto- and microelectronic structures (Invited Paper) [2113-29]

    Svechnikov, S. V. / Fedorenko, L. L. / Kaganovich, E. B. et al. | British Library Conference Proceedings | 1994


    Noninterference method of optical surface roughness measurements [2113-07]

    Kalugin, V. V. / Trofimov, A. V. / Zuniga, V. L. et al. | British Library Conference Proceedings | 1994