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    Title :

    Noninterference method of optical surface roughness measurements [2113-07]



    Conference:

    International workshop, Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 1993 ; Kiev



    Publication date :

    1994-01-01


    Size :

    5 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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