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Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]
X-ray study of the roughness of surfaces and interfaces [4099-12]
Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]
2D-area/3D-volume holographic optical storage nanotechnology [4099-22]
X-ray study of surfaces and interfaces [4449-31]
Effects of particle shape on particle identification and scatter predictions [4449-18]
Die Zukunft: Projekte aus der Sicht der DARA
Die Raumfahrtpolitik aus der Sicht des Deutschen Bundestages
Der Mars: Unser grosses Ziel im Weltraum
Die Aufgabe des MUSC im Bereich der extraterrestrischen Forschung
In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]
Optical characterization of doping profiles in silicon [4099-04]
Microroughness analysis of thin film components for VUV applications [4099-13]
ON UNCERTAINTIES IN CFD SIMULATIONS OF FLOWS WITH SHOCK INDUCED SEPARATION
Numerical Simulation of Steady and Unsteady Euler Flows Around Multibladed Helicopter Rotors
Validation of a New Code for the Prediction of Noise Generated by Helicopter Rotor