This paper proposes a direct nanometer measurement method using the technique of high magnification diffraction imaging. The principles of employing both gratings and speckles are described, in which the illumination distances that generate high magnified and focused images are discussed along with demonstration test results. In addition, the potential extension to sub-nanometer displacement measurement is discussed.


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    Titel :

    Nanometer Displacement Measurement Using High Magnification Diffraction Imaging


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Chen, F. (Autor:in) / Yang, L. X. (Autor:in) / Harwood, P. (Autor:in)

    Kongress:

    SAE 2005 World Congress & Exhibition ; 2005



    Erscheinungsdatum :

    11.04.2005




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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