Fabry-Perot interferometry is a powerful technique for the measurement of extremely small displacements. We have developed a Fabry-Perot interferometer for the calibration of displacement sensors with nanometer accuracy, in order to provide direct traceability of such sensors to the primary standard of length. In conclusion, the Fabry-Perot interferometer provides the possibility to calibrate nanosensors. like capacitive and inductive sensors, with nm accuracy.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Absolute measurement of nanometer displacement with Fabry-Perot interferometry


    Beteiligte:


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    785770 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




    MA3-2 Method of Electron Density Measurement by Fabry-Perot Interferometry

    Hojo, H. | British Library Conference Proceedings | 2005


    Investigation of arc jet plumes with Fabry-Perot interferometry

    Habiger, Harald / Auweter-Kurtz, Monika / Kurtz, Helmut | AIAA | 1994


    Absolute strain measurements with multiplexed low-coherence demodulated fiber Fabry-Perot sensors

    Nellen, P. M. / Pierhoefer, H. / Broennimann, R. et al. | British Library Conference Proceedings | 1994