Fabry-Perot interferometry is a powerful technique for the measurement of extremely small displacements. We have developed a Fabry-Perot interferometer for the calibration of displacement sensors with nanometer accuracy, in order to provide direct traceability of such sensors to the primary standard of length. In conclusion, the Fabry-Perot interferometer provides the possibility to calibrate nanosensors. like capacitive and inductive sensors, with nm accuracy.
Absolute measurement of nanometer displacement with Fabry-Perot interferometry
01.01.2005
785770 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Investigation of Arc Jet Plumes with Fabry-Perot Interferometry
British Library Conference Proceedings | 1994
|MA3-2 Method of Electron Density Measurement by Fabry-Perot Interferometry
British Library Conference Proceedings | 2005
|Fabry-Perot Transducer for Monitoring of Displacement at Low Temperature
British Library Conference Proceedings | 2005
|