Fabry-Perot interferometry is a powerful technique for the measurement of extremely small displacements. We have developed a Fabry-Perot interferometer for the calibration of displacement sensors with nanometer accuracy, in order to provide direct traceability of such sensors to the primary standard of length. In conclusion, the Fabry-Perot interferometer provides the possibility to calibrate nanosensors. like capacitive and inductive sensors, with nm accuracy.


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    Titel :

    Absolute measurement of nanometer displacement with Fabry-Perot interferometry


    Beteiligte:


    Erscheinungsdatum :

    01.01.2005


    Format / Umfang :

    785770 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




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