This paper proposes a direct nanometer measurement method using the technique of high magnification diffraction imaging. The principles of employing both gratings and speckles are described, in which the illumination distances that generate high magnified and focused images are discussed along with demonstration test results. In addition, the potential extension to sub-nanometer displacement measurement is discussed.


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    Title :

    Nanometer Displacement Measurement Using High Magnification Diffraction Imaging


    Additional title:

    Sae Technical Papers


    Contributors:
    Chen, F. (author) / Yang, L. X. (author) / Harwood, P. (author)

    Conference:

    SAE 2005 World Congress & Exhibition ; 2005



    Publication date :

    2005-04-11




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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