This paper proposes a direct nanometer measurement method using the technique of high magnification diffraction imaging. The principles of employing both gratings and speckles are described, in which the illumination distances that generate high magnified and focused images are discussed along with demonstration test results. In addition, the potential extension to sub-nanometer displacement measurement is discussed.
Nanometer Displacement Measurement Using High Magnification Diffraction Imaging
Sae Technical Papers
SAE 2005 World Congress & Exhibition ; 2005
2005-04-11
Conference paper
English
Nanometer displacement measurement using high magnification diffraction imaging
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