We designed a refractive beam shaping element, which forms a line shaped beam out of a Gaussian output beam of a laser diode. Using a geometric optical method based on the thin element approximation (TEA), a refractive element with a height of 45 /spl mu/m and a foot print of about 1200/spl times/500 /spl mu/m was designed. The beam shaping efficiency we measured by 90%. The final element is fabricated in fused silica. We developed a process which keeps the surface profile and gives the resist the necessary stability for etching. With this process we achieved a high form stability of arbitrary profiles sufficient for the proportional transfer even by ICP-etching (inductive coupled plasma etching). Based on this technology we fabricated the beam shaping elements and lens arrays.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Improved resist treatment for gray tone lithographic beam shaping element fabrication


    Beteiligte:
    Hartung, H. (Autor:in) / Cumme, M. (Autor:in) / Thieme, M. (Autor:in) / Kley, E.-B. (Autor:in) / Tunnerman, A. (Autor:in)


    Erscheinungsdatum :

    01.01.2003


    Format / Umfang :

    71774 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Micro-optic fabrication using one-level gray-tone lithography [3008-32]

    Reimer, K. / Quenzer, H.-J. / Juerss, M. et al. | British Library Conference Proceedings | 1997


    Skeletonization of labeled gray-tone images

    Arcelli, C. / Serino, L. | British Library Online Contents | 2005


    Photonic lattices fabrication using Si lithographic processes

    Fleming, J. G. / Lin, S.-Y. / Guo li Taiwan da xue et al. | British Library Conference Proceedings | 2003


    Intensity Driven Detection of Parts in Gray-Tone Patterns

    Arcelli, C. / Ramella, G. / Serino, L. | British Library Online Contents | 1996


    Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication

    Wang, Y. H. / Malar, P. / Kan, J. A. | British Library Online Contents | 2014