Micro-optic fabrication using one-level gray-tone lithography [3008-32]
Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA
01.01.1997
10 pages
Aufsatz (Konferenz)
Englisch
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Online Contents | 2009
Kraftfahrwesen | 2009
|DataCite | 1903
Kraftfahrwesen | 2012
|Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
British Library Conference Proceedings | 1997
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