Summary form only given. In-situ process combines film growth and device fabrication steps which take place under an ultra high vacuum or a controlled ambient environment. Results of materials and devices produced using this technique with molecular beam epitaxy are reviewed.
Recent advances of in-situ process in molecular beam epitaxy
Proceedings of LEOS'94 ; 2 ; 348 vol.2
01.01.1994
23217 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Recent Advances of In-Situ Process in Molecular Beam Epitaxy
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