Summary form only given. In-situ process combines film growth and device fabrication steps which take place under an ultra high vacuum or a controlled ambient environment. Results of materials and devices produced using this technique with molecular beam epitaxy are reviewed.


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    Titel :

    Recent advances of in-situ process in molecular beam epitaxy


    Beteiligte:
    Hong, M. (Autor:in)

    Erschienen in:

    Proceedings of LEOS'94 ; 2 ; 348 vol.2


    Erscheinungsdatum :

    01.01.1994


    Format / Umfang :

    23217 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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