The invention belongs to the technical field of crown block control, and discloses a speed control system and method for a wafer carrying system. Comprising the steps that operation data collected by a crown block end are received, and the operation data comprise the crown block position and crown block data; analyzing the crown block data, obtaining a braking distance corresponding to the crown block, and judging the type of a running track where the crown block is located; according to the positions of the crown blocks, the m crown blocks are obtained, the next arrived sections of the m crown blocks are all the same section, are all located in different sections at present and are all marked as rear crown blocks, and priority coefficients corresponding to the m rear crown blocks are calculated; judging the operation sequence of the m rear crown blocks according to the priority coefficients; the arrival time and the following distance of the m rear crown blocks are calculated, whether a control instruction is generated or not is judged, and the corresponding rear crown blocks are controlled according to the control instruction; according to the invention, accurate multi-crane linkage speed control is realized, and the running safety and efficiency of the crown block are improved.

    本发明属于天车控制技术领域,本发明公开了一种用于晶圆搬运系统的速度控制系统及方法;包括:接收天车端采集的运行数据,运行数据包括天车位置和天车数据;对天车数据进行分析,获取天车对应的制动距离,并判断天车所在运行轨道的类型;根据天车位置,获取m辆天车,m辆天车下一个到达的区段均为同一个区段,且当前均处于不同的区段,并均标记为后置天车,计算m辆后置天车对应的优先系数;根据优先系数判断m辆后置天车的运行顺序;计算m辆后置天车的到达时间和跟随距离,判断是否生成控制指令,根据控制指令对对应的后置天车进行控制;本发明实现精准的多车联动速度控制,提高天车运行安全性和效率。


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    Titel :

    Speed control system and method for wafer carrying system


    Weitere Titelangaben:

    一种用于晶圆搬运系统的速度控制系统及方法


    Beteiligte:
    LIN JIAN (Autor:in) / WANG PENG (Autor:in) / WU GUOMING (Autor:in) / WANG DONGLIANG (Autor:in)

    Erscheinungsdatum :

    2024-03-22


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    B66C Krane , CRANES / G06F ELECTRIC DIGITAL DATA PROCESSING , Elektrische digitale Datenverarbeitung / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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