Single mask fabrication process for movable MEMS devices
MICROSYSTEM TECHNOLOGIES ; 20 , 4/5 ; 955-961
01.01.2014
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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Silicon IC compatible LIGA mask-fabrication process
British Library Online Contents | 1997
|British Library Online Contents | 2009
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