MEMS technology offer substantial advantages for optical systems: Tight dimensional tolerances allow accurate control of optical fields, MEMS actuators provide tunability, parallel processing leads to low cost, and miniaturization simplifies packaging and installation. Cost-effective use of microfabrication technology requires miniaturization, however, so optical MEMS presents unique challenges in design and scaling.


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    Titel :

    Optical MEMS fabrication, scaling and design of microoptical devices and systems


    Beteiligte:
    Solgaard, O. (Autor:in)


    Erscheinungsdatum :

    01.01.2003


    Format / Umfang :

    103812 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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