MEMS technology offer substantial advantages for optical systems: Tight dimensional tolerances allow accurate control of optical fields, MEMS actuators provide tunability, parallel processing leads to low cost, and miniaturization simplifies packaging and installation. Cost-effective use of microfabrication technology requires miniaturization, however, so optical MEMS presents unique challenges in design and scaling.
Optical MEMS fabrication, scaling and design of microoptical devices and systems
01.01.2003
103812 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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