MEMS technology offer substantial advantages for optical systems: Tight dimensional tolerances allow accurate control of optical fields, MEMS actuators provide tunability, parallel processing leads to low cost, and miniaturization simplifies packaging and installation. Cost-effective use of microfabrication technology requires miniaturization, however, so optical MEMS presents unique challenges in design and scaling.


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    Title :

    Optical MEMS fabrication, scaling and design of microoptical devices and systems


    Contributors:


    Publication date :

    2003-01-01


    Size :

    103812 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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