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micromachining
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technology
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Micromachined optical concentrators for IR LEDs [4179-13]
Refractive microlenses for ultraflat photolithographic projection systems (Invited Paper) [4179-15]
Beam-shaping elements for holographic applications [4179-02]
Bulk micromachining for sensors and actuators [4179-201]
Approach to higher reliability in 3D micromechanisms (Invited Paper) [4179-20]
Fabrication of microlens arrays in CaF~2 by ion milling [4179-12]
Micro-optics development in the past decade (Invited Paper) [4179-01]
Experimental realization of a diffractive optical isolator [4179-18]
Micro-optical elements fabricated with single step [4179-05]
Fabrication of micro-optical components by high-precision embossing [4179-10]
Fabrication technologies for micro-optical elements with arbitrary surfaces [4179-04]
Polymer UV-molding for micro-optical systems and O/E-integration [4179-16]
Abrasive flow is more than finishing
Miniaturized objective lens for a photoelectron emission microscope [4179-17]
3D, high-resolution deep x-ray absorber mask [4179-08]
MEMS/MOEMS for lightwave networks: Can little machines make it big? [4179-200]