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    Title :

    Refractive microlenses for ultraflat photolithographic projection systems (Invited Paper) [4179-15]



    Conference:

    Conference, Micromachining technology for micro-optics ; 2000 ; Santa Clara, CA



    Publication date :

    2000-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Micro-optics development in the past decade (Invited Paper) [4179-01]

    Sankur, H. O. / Motamedi, M. E. / International Society for Optical Engineering et al. | British Library Conference Proceedings | 2000


    Optical measurement methods for refractive microlenses and arrays (Invited Paper) [4455-46]

    Lindlein, N. / Schwider, J. / SPIE | British Library Conference Proceedings | 2001


    Approach to higher reliability in 3D micromechanisms (Invited Paper) [4179-20]

    Shibaike, N. / Takeuchi, H. / Nakamura, K. et al. | British Library Conference Proceedings | 2000


    Nr. 4179

    DataCite | 1925


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