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    Title :

    Approach to higher reliability in 3D micromechanisms (Invited Paper) [4179-20]



    Conference:

    Conference, Micromachining technology for micro-optics ; 2000 ; Santa Clara, CA



    Publication date :

    2000-01-01


    Size :

    10 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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