1–20 of 65 hits
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    Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]

    Azzam, R. M. A. / SPIE | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]

    Vollrath, W. / SPIE | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    2D-area/3D-volume holographic optical storage nanotechnology [4099-22]

    Thomas, M. E. / SPIE | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]

    Li, J. / Xiao, S. / Li, X. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Development of an automated optical system for the analysis of etch pits density and distribution on semiconductor materials [4099-02]

    Dedavid, B. A. / da Costa, E. M. / Soares, A. B. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Optical characterization of doping profiles in silicon [4099-04]

    Bernini, R. / Zeni, L. / Pierri, R. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings [4099-11]

    Gatto, A. / Commandre, M. / SPIE | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]

    Gliech, S. / Steinert, J. / Flemming, M. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]

    van Amstel, W. D. / van de Goor, P. F. A. / Horijon, J. L. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Methods, error influences, and limits for the ultraprecise measurement of slope and figure for large, slightly nonflat, or steep complex surfaces [4099-18]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]

    Gunster, S. / Ristau, D. / Bosch, S. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]

    Kadkhoda, P. / Blaschke, H. / Kohlhaas, J. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    X-ray study of the roughness of surfaces and interfaces [4099-12]

    Kozhevnikov, I. V. / Asadchikov, V. E. / Bukreeva, I. N. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Keywords: optical metrology , semiconductor industries , data storage industries