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    Title :

    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]



    Conference:

    Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4099

    DataCite | 1924


    Optical characterization of doping profiles in silicon [4099-04]

    Bernini, R. / Zeni, L. / Pierri, R. et al. | British Library Conference Proceedings | 2000


    Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencies [4099-06]

    Crozier, K. B. / Yaralioglu, G. G. / Degertekin, F. L. et al. | British Library Conference Proceedings | 2000


    Standardization in optics characterization (Invited Paper) [4099-14]

    Ristau, D. / SPIE | British Library Conference Proceedings | 2000


    2D-area/3D-volume holographic optical storage nanotechnology [4099-22]

    Thomas, M. E. / SPIE | British Library Conference Proceedings | 2000