A silicon resonant angular rate sensor which is suited for mass production is introduced. Its simple design makes the sensor easy to implement with no special care. In a drying process after wet process, the cantilever does not sticks, nor breaks even in a spin dryer. Its performance is almost the same as the conventional angular rate sensors.


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    Title :

    Silicon resonant angular rate sensor for vehicle stability control


    Contributors:
    Matsuura, T. (author) / Tsutsumi, K. (author) / Taguchi, M. (author) / Taruya, M. (author) / Hara, T. (author) / Ohashi, Y. (author)


    Publication date :

    1998


    Size :

    5 Seiten, 4 Quellen



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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