A silicon resonant angular rate sensor which is suited for mass production is introduced. Its simple design makes the sensor easy to implement with no special care. In a drying process after wet process, the cantilever does not sticks, nor breaks even in a spin dryer. Its performance is almost the same as the conventional angular rate sensors.


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    Titel :

    Silicon resonant angular rate sensor for vehicle stability control


    Beteiligte:
    Matsuura, T. (Autor:in) / Tsutsumi, K. (Autor:in) / Taguchi, M. (Autor:in) / Taruya, M. (Autor:in) / Hara, T. (Autor:in) / Ohashi, Y. (Autor:in)


    Erscheinungsdatum :

    1998


    Format / Umfang :

    5 Seiten, 4 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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