Microsystem technology is defined in comparison to microelectronics. The development of dedicated micro-fabrication technologies is summarized and recent developments of microsystems for typical application fields are shown. Specific problems of industrial application are discussed.


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    Title :

    Microsystem technology: between research and industrial application


    Contributors:
    Abraham, M. (author) / Ehrfeld, W. (author) / Hessel, V. (author) / Kamper, K.P. (author) / Lacher, M. (author) / Picard, A. (author)


    Publication date :

    1998


    Size :

    6 Seiten, 7 Quellen




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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