Microsystem technology is defined in comparison to microelectronics. The development of dedicated micro-fabrication technologies is summarized and recent developments of microsystems for typical application fields are shown. Specific problems of industrial application are discussed.
Microsystem technology: between research and industrial application
Micro- and Nano- Engineering 97, MNE, International Conference on Micro- and Nanofabrication, 1997 ; 47-52
Microelectronic Engineering ; 41-42
1998
6 Seiten, 7 Quellen
Conference paper
English
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