Microsystem technology is defined in comparison to microelectronics. The development of dedicated micro-fabrication technologies is summarized and recent developments of microsystems for typical application fields are shown. Specific problems of industrial application are discussed.


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    Titel :

    Microsystem technology: between research and industrial application


    Beteiligte:
    Abraham, M. (Autor:in) / Ehrfeld, W. (Autor:in) / Hessel, V. (Autor:in) / Kamper, K.P. (Autor:in) / Lacher, M. (Autor:in) / Picard, A. (Autor:in)


    Erscheinungsdatum :

    1998


    Format / Umfang :

    6 Seiten, 7 Quellen




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch





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