Cryopumps with pumping speeds of 5000 to more than 100000 l/s for nitrogen are used for many applications and particularly for producing clean high vacuum in space simulation chambers. After some general notes on the different pumping mechanisms, some types of appendage and open-type refrigerator-cooled cryopumps are presented as well as a helium-gas-cooled cryopump with extremely low vibrations.


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    Title :

    Cryopumps for evacuating space simulation chambers


    Additional title:

    Kryopumpen zum Evakuieren von Kammern fuer die Raumsimulation


    Contributors:
    Schafer, G. (author) / Hafner, H.U. (author)


    Publication date :

    1987


    Size :

    4 Seiten, 6 Quellen



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




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