Cryopumps with pumping speeds of 5000 to more than 100000 l/s for nitrogen are used for many applications and particularly for producing clean high vacuum in space simulation chambers. After some general notes on the different pumping mechanisms, some types of appendage and open-type refrigerator-cooled cryopumps are presented as well as a helium-gas-cooled cryopump with extremely low vibrations.
Cryopumps for evacuating space simulation chambers
Kryopumpen zum Evakuieren von Kammern fuer die Raumsimulation
Journal of Vacuum Science and Technology, Part A (Vacuums, Surfaces, and Films) ; 5 , 4, PT.4 ; 2359-2362
1987
4 Seiten, 6 Quellen
Aufsatz (Zeitschrift)
Englisch
HOCHVAKUUM , VAKUUMKAMMER , WELTRAUM , SIMULATION , KRYOTECHNIK , REINHEIT , VAKUUMPUMPE , HELIUM , GASKUEHLUNG , ULTRAHOCHVAKUUM
Installation of cryopumps in the estec-space simulation chambers
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