Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.


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    Title :

    Integrated Microsystems


    Contributors:


    Publication date :

    2012


    Size :

    10 Seiten




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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