Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.
Integrated Microsystems
CIMTEC, CIMTEC, 2012, International Conference on Smart Materials, Structures and Systems, 4 ; 55-64
2012
10 Seiten
Aufsatz (Konferenz)
Englisch
Heatpipe Integrated Microsystems
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