Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Integrated Microsystems


    Beteiligte:
    Esashi, Masayoshi (Autor:in) / Tanaka, Shuji (Autor:in)


    Erscheinungsdatum :

    2012


    Format / Umfang :

    10 Seiten




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Heatpipe Integrated Microsystems

    Robertson, P. / Shul, R. / Tigges, C. et al. | British Library Conference Proceedings | 1999


    Integrated Power for Microsystems

    Lakeman, Charles / Fleig, Patrick / DeGreeff, Jenniffer | AIAA | 2004




    AIAA-2004-6733 Integrated Power for Microsystems

    Lakeman, C. / DeGreeff, J. / Fleig, P. | British Library Conference Proceedings | 2004