In 2001 volume production of the first MEMS-based angular rate sensor for roll-over sensing and navigation control started. In this paper the next generation of a micromachined gyroscope is presented. The new sensor again uses an oscillating disc which is deflected by a coriolis force in case of an angular rate applied. This deflection is measured capacitively by electrodes underneath the disc. The resonance frequency has been increased from 1.5kHz to 5kHz compared with the previous sensor generation. The sensor is packaged in a PLCC44 together with a fully digital signal processing unit. In order to facilitate a broad application the sensor is equipped with a digital output (SPI) as well as with an additional analog output.
A new micromachined gyroscope with digital output
Ein neues mikrotechnisches Gyroskop mit digitalem Ausgang
2003
10 Seiten, 7 Bilder, 1 Tabelle, 8 Quellen
Conference paper
English
A New Micromachined Gyroscope with Digital Output
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British Library Conference Proceedings | 2003
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British Library Conference Proceedings | 2002
|Micromachined gyroscope in silicon-on-insulator (SOI) technology
Tema Archive | 2002
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